The 2-Minute Rule for Tantalum sputtering targets
The 2-Minute Rule for Tantalum sputtering targets
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Layer termination from ellipsometric facts is totally built-in into Aeres®. A number of multi-wavelength and spectroscopic ellipsometry solutions can be obtained Using the ion beam sputter deposition system.
In-situ optical monitoring and Management is offered by Angstrom’s optical checking & Command package deal.
An optional cryogenic pump increases base strain and pumping speed and will be isolated in the chamber for the duration of reactive processes with oxygen.
The scale, posture, and kit ratio of each Earth are optimized to deliver the best possible probable film thickness uniformity.
Our Reticle® ion beam sputter deposition systems are developed and engineered to generate specific optical movies of the very best purity, density, and steadiness.
Variable angle phases let for incredibly powerful thin movie approaches. Nevertheless, considered one of its biggest difficulties is reproducibility. The substrate is commonly established at a really oblique angle in relation to your supply, and the movies are very sensitive to your precision of the angle.
Angstrom Engineering® styles and engineers Just about every Reticle® System to supply our companions from the optics Group the ability to generate the films they require with great purity, density, and uniformity, all within a extremely repeatable and automatic Zirconium and niobium supply fashion.
Our special design and style allows for immediate or oblique checking in the variable angle phase, eliminating the need for tooling variables or a witness glass changer. Find out more concerning the Optical Checking & Control package here.
IBSD processes might also hire a secondary ion resource for substrate cleaning and energetic assist, substrate heating for reactive deposition, As well as in-situ optical checking or ellipsometry for crucial layer thickness termination.
The IBSD course of action produces a highly energetic flux of deposition substance, leading to movies with enhanced density, hardness, and area roughness in comparison with Those people deposited by evaporation processes.
The deposition ion source is directed towards a fabric focus on that has been optimized in equally dimensions and posture with the required deposition geometry.
Self-aligned ion optics are configured specifically for the specified deposition requirements and geometry of your respective approach.
Angstrom Engineering’s Reticle® methods give a transform-crucial Option for people trying to know any optical style right into a high-performance movie.
Dynamic uniformity shaping is attained employing a flux correction defend among the deposition source and also the substrate.
Considerate design from the ion beam focusing optics confines the beam solely to the area with the focus on, eradicating any hazard of contamination.